User Fees

Super User Fees 2000 / month
Clean Room Access Charges 24.20/hr (internal user, capped at $96.80 day);
$61.60/hr (external user)
Gold Surcharge 44 + $40 / 50nm
Staff Assistance Charge 171.60/hour

 

 

  Internal External
4 Point Probe Manual   5.50 13.75
Anatech SP-100 Plasma System   27.50 68.75
Brewer Spinner   11.00 27.5
Carl Zeiss 1540   82.50 206.25
Carl Zeiss 1540 Cross Beam   154.00 385
Clean room access   0.00 0
Dek-tak 3030/3ST   5.50 13.75
Dek-tak 3030/3ST (Clean Room only)   5.50 13.75
E-beam Evaporater   33.00 82.5
Electrical Probe Station   16.50 41.25
Electroplating/Lift Off Bench: Bay 3   0.00 0
Evatec Clusterline Sputtering tool   125.00 312.5
EVG 501 Bonder   55.00 137.5
EVG 610 Mask Aligner   49.50 123.75
J.C. Nabity system   5.50 13.75
KLA-TENCOR FLX-2320   22.00 55
Laurell Spinner   11.00 27.5
LC Technologies Glove Box   27.50 68.75
Micro Automation 1006   26.40 66
MIE wire Bonder   22.00 55
Mini Brute Furnace   27.50 68.75
MRC 8667   27.50 68.75
Nanonex NX2000   66.00 165
Nanospec Spectrophotometer   5.50 13.75
Optiphot 200 Fluorescence MicroScope   5.50 13.75
Oxford Plasma Lab System   66.00 165
PANalytical/Philips X'Pert Pro   22.00 55
Parks Scientific XE7 AFM   38.50 96.25
Perkin Elmer 2400   27.50 68.75
PGT Shara   5.50 13.75
Phoenix Contact angle measurement   5.50 13.75
Photo bay   0.00 0
Pre-diffusion Clean Bench: Bay 1   0.00 0
Quintel 4000 Mask Aligner   33.00 82.5
Savannah ALD   5.50 13.75
SCS Parylene Coating   220.00 550
Sputter Coater   11.00 27.5
Supra 25 SEM   44.00 110
Thermal Evaporater   30.80 77
Tousimus Critical Point Dryer   27.50 68.75
ULVAC NLD-570   66.00 165
Unaxis PlasmaTherm 790   55.00 137.5
UV spectrophotometer   33.00 82.5
Veeco Microtech Ion Mill   55.00 137.5
Wet Etch Bench: Bay 2   0.00 0
Woollam ESM- 300 Ellipsometer   22.00 55
XACTIX e1   22.00 55
Zygo NuView 6000   22.00 55
Zyvex Nanomanipulator   55.00 137.5

Fab Notices

  • Oxford Plasma Lab System

    The Oxford Plasma Lab system will be down for parts replacement purposes. Updates as to when the equipment will be back online will be posted shortly.

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  • Thermal Evaporator

    The Thermal Evaporator will be down approximately until December 11th, 2017 for repair of the cryopump. Further updates will be posted on the website.

    Read More

Upcoming Events

Kostas Center News

  • Publications

    1. Congratulations to the members of the Advanced Manufacturing, Energy Storage, and Multifunctional Materials group for publishing "Stable and Aligne

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Contact Kostas Center

448 Egan Center, 360 Huntington Ave., Boston, Massachusetts 02115 Phone: 617-373-5848
Email: s.somu@neu.edu