The Savannah 100 is an atomic layer deposition (ALD) tool used for growing conformal layers of thin films, atomic layer by layer. This tool can handle small pieces up to 4" wafers.

Precursors for growing HfO2, ZrO2, TiO2 and Al2O3 are available.

Additional Resources

Savannah ALD
Training Contact: Sivasubramanian Somu
Service Contact: Scott McNamara