Nanospec spectrophotometer works on the principle that intensity of monochromatic reflected light depends strongly on film thickness. It uses a computer-controlled grating monochromator and a photomultiplier tube detector to measure the reflected optical spectrum from a bare silicon reference wafer and from the wafer under test. Provided with an index of refraction for a thin film and the two measured spectrums, the computer will analyze the interference pattern to determine film thickness.

Additional Resources

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