Description

ANATECH SP 100 is a quartz barrel plasma system, which uses oxygen as a plasma gas while the plasma is generated using a RF generator (100 Watt RF 13.56 MHz). It has a chamber size 4” in diameter and 8” long. It is used for removing organic contaminants and traces of photoresist residue of developed/patterned substrates.

Additional Resources


Warning: require_once(/home/kostas/public_html/test2.php): failed to open stream: No such file or directory in /home/kostas/public_html/wp-content/themes/Northeastern/ToolDetail.php on line 112

Fatal error: require_once(): Failed opening required '/home/kostas/public_html/test2.php' (include_path='.:/usr/lib/php:/usr/local/lib/php') in /home/kostas/public_html/wp-content/themes/Northeastern/ToolDetail.php on line 112