ANATECH SP 100 is a quartz barrel plasma system, which uses oxygen as a plasma gas while the plasma is generated using a RF generator (100 Watt RF 13.56 MHz). It has a chamber size 4” in diameter and 8” long. It is used for removing organic contaminants and traces of photoresist residue of developed/patterned substrates.

Additional Resources

Anatech SP-100 Plasma System
Training Contact: Sivasubramanian Somu
Service Contact: Scott McNamara