The SCS Parylene deposition system is capable of applying conformal coating of Parylene with thickness ranging from a few hundred nanometers up to 75 microns. These Parylene coatings are inert and biocompatible and have excellent moisture, chemical and dielectric barrier properties and used for coating components such as circuit boards, sensors, wafers, medical devices, MEMS and elastomeric components. It can accept chips and wafers as large as 6 inch (can accept 12 wafers/per process) for processing.

Additional Resources

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